发明名称 |
METHOD OF FABRICATING PATTERN |
摘要 |
PURPOSE: A method for manufacturing a pattern is provided to improve laser absorption by hardening an organic ink layer into a semi-solid state. CONSTITUTION: A metal organic ink layer is formed on a substrate. The metal organic ink layer is hardened into a semi-solid state. A pattern is formed by irradiating laser light on the metal organic ink layer of the semi-solid state. The metal organic ink layer of the semi-solid state is removed.
|
申请公布号 |
KR20120007381(A) |
申请公布日期 |
2012.01.20 |
申请号 |
KR20100068120 |
申请日期 |
2010.07.14 |
申请人 |
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
YANG, MIN YANG;KANG, BONG CHUL;LEE, SUNG GUN;NOH, JI WHAN |
分类号 |
H01L21/268;B23K26/36;H01L21/027 |
主分类号 |
H01L21/268 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|