发明名称 METHOD OF FABRICATING PATTERN
摘要 PURPOSE: A method for manufacturing a pattern is provided to improve laser absorption by hardening an organic ink layer into a semi-solid state. CONSTITUTION: A metal organic ink layer is formed on a substrate. The metal organic ink layer is hardened into a semi-solid state. A pattern is formed by irradiating laser light on the metal organic ink layer of the semi-solid state. The metal organic ink layer of the semi-solid state is removed.
申请公布号 KR20120007381(A) 申请公布日期 2012.01.20
申请号 KR20100068120 申请日期 2010.07.14
申请人 KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 YANG, MIN YANG;KANG, BONG CHUL;LEE, SUNG GUN;NOH, JI WHAN
分类号 H01L21/268;B23K26/36;H01L21/027 主分类号 H01L21/268
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