SOLAR CELL AND METHOD OF FABRICATING THE SAME

摘要

PURPOSE: A solar battery and a manufacturing method thereof are provided to improve light efficiency by forming a minute anti-reflection pattern by using a dry etching process. CONSTITUTION: An upper side of a semiconductor substrate(102) is planarized. An anti-reflection pattern(120) including a plurality of protrusions(121) is formed on an upper side of a planarized semiconductor substrate. The upper side of the semiconductor substrate is textured by using a dry etching process. The upper side of a textured substrate is surface-treated. The planarization, texturing, and surface-treating of the semiconductor substrate are successively performed in the same chamber(10).