发明名称 INGOT GROWER
摘要 PURPOSE: An ingot grower is provided to prevent magnetic fluid to lose magnetism because of a heat by preventing the heat which is delivered to a magnetism fluid sealing part. CONSTITUTION: The upper side of housing is fixed to a base plate and the lower side of the housing is penetrated from the lower side of a chamber to the inside of the chamber. A bellows(120) is installed in order to surround at least a part of a sealing opening(110). The bellows maintains confidentiality by sealing a combined part of the sealing opening and the chamber. A crucible(130) is installed in the upper side of the sealing opening to be settled and grows up an ingot(160). A rotary joint(140) is combined with the sealing opening in the lower side of the sealing opening. The chamber offers environment which is able to grow up the ingot by maintaining a vacuum condition.
申请公布号 KR101106157(B1) 申请公布日期 2012.01.20
申请号 KR20100120010 申请日期 2010.11.29
申请人 PARK, KWANG JUN 发明人 PARK, KWANG JUN
分类号 C30B17/00;C30B15/00;C30B29/06;H01L21/02 主分类号 C30B17/00
代理机构 代理人
主权项
地址