| 摘要 |
<p>PURPOSE: A multi-layered thin film encapsulation for an organic solar cell and a manufacturing method thereof are provided to improve the manufacture stability of a product by preventing the thermal damage of an element which is generated in a manufacturing process. CONSTITUTION: A substrate(1) comprises an upper layer(3) and a lower layer(2). A silicon nitride layer is layered on the lower layer. The silicon nitride layer is layered on the upper layer. The permeability of the lower layer of the silicon nitride is more than 70%. The permeability of the upper layer of the silicon nitride is more than 80%. The silicon nitride layer of the lower layer and the upper layer is layered using a hotwire chemical vapor deposition system. A lower particulate of the silicon nitride has porous morphology and an upper particulate of the silicon nitride has dense morphology.</p> |
