SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE TRANSPORT METHOD

摘要

PURPOSE: A substrate processing device and a substrate transferring method are provided to decrease a substrate transfer range through a first transfer robot and a second transfer robot. CONSTITUTION: A first transfer robot outputs n substrates from a first holding unit(27a) and inputs n substrates to n substrate holding units. A rotating unit rotates (n+m) substrate holding units. A second holding unit outputs m substrates from one side of an arrangement direction and inputs n substrates to a second holding unit(27b). If the substrate is inverted, the first transfer robot n substrates to n substrate holding units from one side of the arrangement direction again.