AIR KNIFE CHAMBER HAVING BLOCKING MEMBER

摘要

PURPOSE: An air knife chamber including a blocking member is provided to reduce defects of a substrate by dropping water in front of a slit. CONSTITUTION: A chamber body includes an inlet and an outlet. A partition(30) is installed between the inlet and the outlet and divides the chamber body into a front side and a rear side. A slit is formed on the partition not to pass the substrate. A blocking member(40) is installed in the partition on the upper side of the slit. An air knife(14) sprays gas with high pressure to remove liquid remaining on the substrate.