METHOD AND SYSTEM OF INSPECTING A PLURALITY OF SUBSTRATES

摘要

PURPOSE: A method and a system for inspecting multiple substrates are provided to lower the complexity of a system and reduce inspection time since substrates, vertically positioned, are inspected at a time. CONSTITUTION: A system for inspecting multiple substrates comprises a first detecting unit(222) and a first light source unit(220). The first detecting unit inspects the first substrate(210). The first light source unit irradiates the light on an area which is detected among the first substrates by the first detecting unit. The first detecting unit is located on the top of the first substrate. The first light source unit is separated from the lower part of the first substrate and is located on the lower part of the second substrate(212). When the first detecting unit is tilted at a fixed angle, the first detecting unit irradiates the light on the first substrate.