摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a liquid ejection head that has a reduced manufacturing cost and is unlikely to cause a continuity failure between a lead electrode and a wiring substrate. <P>SOLUTION: Since a through-hole 33 into which a COF substrate 210 is inserted is blocked by a lid 34 before a protection film 16 is formed by a CVC method, the lid 31 prevents a raw material gas used for the CVC method by the lid 34 from entering the through-hole 33, so the protection film 16 is not formed on the lead electrode 90 drawn by the through-hole 33. Accordingly, the continuity failure is less likely to occur in the connection of the lead electrode 90 with a COF substrate 210, thus the method of manufacturing of an inkjet recording head 1 having the reduced manufacturing cost can be obtained. <P>COPYRIGHT: (C)2012,JPO&INPIT |