A CHUCK, AND A METHOD FOR BRINGING A FIRST AND A SECOND SUBSTRATE TOGETHER

摘要

A chuck (100, 200, 500) for holding a master electrode (107, 207) or a substrate (111, 211) during an ECPR process is provided. The chuck comprises an interaction surface (102, 201) onto which the master electrode (107, 207) or the substrate (111, 211) is arranged, and attaching means (105, 205) for clamping said master electrode (107, 207) or said substrate (111, 211) to said interaction surface (102, 201) such that said master electrode (107, 207) or said substrate (111, 211) is conforming to the shape of said interaction surface (102, 201). Further, a method for bringing a master electrode in contact with a substrate in an ECPR process is provided. The method comprises the steps of arranging a master electrode or a substrate on a chuck, arranging a substrate or a master electrode on a second chuck, aligning said master electrode and said substrate such that a front side of said master electrode is at a distance from and facing a front side of said substrate, and bringing the front side of the master electrode into contact with the front side of the substrate by decreasing said distance such that a centre of the master electrode contacts a centre of the substrate, and continuously decreasing said distance while also continuously decreasing said convex shape.