发明名称 |
RING LIGHT ILLUMINATOR AND BEAM SHAPER FOR RING LIGHT ILLUMINATOR |
摘要 |
A ring light illuminator with annularly arranged light sources is disclosed. To each light source there corresponds a beam shaper comprising a light collector, a homogenizing means for light from the light source, and an imaging means for imaging an output of the homogenizing means into an area to be illuminated. The homogenizing means in embodiments is a rod, into which light from the light collector is directed. The end of the rod opposite the light collector is imaged by the imaging means into the area to be illuminated. |
申请公布号 |
WO2011135534(A3) |
申请公布日期 |
2012.01.19 |
申请号 |
WO2011IB51867 |
申请日期 |
2011.04.28 |
申请人 |
KLA-TENCOR CORPORATION;HILL, ANDY |
发明人 |
HILL, ANDY |
分类号 |
F21S2/00;F21V5/00;F21V8/00;F21V29/00;F21Y101/02 |
主分类号 |
F21S2/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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