| 摘要 |
A liquid recovery apparatus is used in an immersion exposure apparatus and is connected to a liquid immersion member, which is disposed at least partly around an optical path of exposure light that passes through an optical member and a liquid between the optical member and an object. The liquid recovery apparatus comprises: a first passageway, which is connected to a discharge part of the liquid immersion member that separately discharges the liquid and a gas from a recovery passageway of the liquid immersion member wherethrough the liquid recovered via a recovery port of the liquid immersion member flows, into which the liquid discharged via a first discharge port of the discharge part flows; a second passageway, into which the gas discharged via a second discharge port of the discharge part flows; and a first detection apparatus, which is disposed in at least part of the second passageway and detects the amount of the gas discharged via the second discharge port. |
