MULTILAYERED NANOCOMPOSITE FOR CAPACITORS AND METHOD FOR MANUFACTURING SAME

摘要

The multilayered nanocomposite for capacitors comprises a substrate 1 consisting of a graphite film with a density of from 0.27 to 1.2 g/cm3, wherein a layer 2 of amorphous aluminium oxide, a layer 3 of titanium oxide of the rutile modification and a layer 4 of titanium nitride are arranged successively on the face of said substrate, with the layers being formed using the method of atomic layer deposition. Furthermore, the application of the layer of aluminium oxide is performed at a temperature of 270-330°C by means of the alternate pulsed supply of the following precursors to the reaction chamber: trimethylaluminium and ozone. The application of the layer of titanium dioxide is performed at a temperature of 450-500°C by means of the alternate pulsed supply of the following precursors to the reaction chamber: titanium tetrachloride and water, while the application of the layer of titanium nitride is performed at a temperature of 460-490°C by means of the alternate pulsed supply of precursors to the reaction chamber, with the precursors used being titanium tetrachloride and ammonia.