LIGHT MODULATOR PIXEL UNIT AND MANUFACTURING METHOD THEREOF

摘要

A light modulator pixel unit and a manufacturing method thereof are provided. The pixel unit includes a bottom electrode, a movable electrode and a top electrode. Under the control of a control circuit, the movable electrode would deflect to a first position, a second position and a third position respectively. When the movable electrode is positioned at the first position and a first light is incident to the light modulator pixel unit, the light reflected by the top electrode interferes destructively with the light which firstly transmits through the top electrode, then is reflected by the movable electrode and finally transmits through the top electrode. The principle of modulating a second light when the movable electrode is positioned at the second position and the principle of modulating a third light when the movable electrode is positioned at the third position are the same as the principle of modulating the first light when the movable electrode is positioned at the first position. The said first light, second light and third light are monochromatic lights at three specific wavelength ranges respectively. The light modulator pixel unit of the present invention can control monochromatic lights of three special wavelengths by time division, and enable color control and gray control. The unit is applicable in the field of projection display and panel system.