| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a novel metal/insulator nano-granular thin film and a nano-granular composite thin film including the same, and a thin-film magnetic sensor using them. <P>SOLUTION: The metal/insulator nano-granular thin film includes ferromagnetic particles each having a composition represented by Co<SB POS="POST">2</SB>Fe(Al<SB POS="POST">1-x</SB>Si<SB POS="POST">x</SB>)(where 0<x<1), and an insulative matrix composed of insulative material filling the space around the ferromagnetic particles. The nano-granular composite thin film includes a buffer layer made of MgO, NiO, SiO<SB POS="POST">2</SB>or Al<SB POS="POST">2</SB>O<SB POS="POST">3</SB>, and a metal/insulator nano-granular thin film according to the invention, which is formed on the surface of the buffer layer. The thin-film magnetic sensor includes a metal/insulator nano-granular thin film or nano-granular composite thin film according to the invention. <P>COPYRIGHT: (C)2012,JPO&INPIT |
