| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve ejection accuracy and maintainability by accurately forming a boundary between a hydrophilic nozzle internal surface and a water-repellent ejection surface. <P>SOLUTION: A method for manufacturing a nozzle plate includes: a step of forming a bottomed recessed shape in a first surface of a substrate, at a place where a nozzle is to be formed; a step of forming a liner film on the surface of the recessed shape; a step of etching a second surface opposite from the first surface, thereby exposing the liner film in a projecting shape; a step of forming a functional film on the second surface; a step of etching the functional film until the liner film with the projecting shape is exposed; and a wet etching step of etching the exposed liner film surface by introducing fluid into the recessed shape of the first surface and immersing the second surface in a treating agent, thus forming a nozzle. <P>COPYRIGHT: (C)2012,JPO&INPIT |
