| 摘要 |
PURPOSE: A cleaning apparatus using ice spraying is provided to a cleaning object from being damaged by spraying a desired size of an ice particle on a surface of the cleaning object. CONSTITUTION: A cleaning water supply portion(10) supplies purified cleaning water. An evaporation portion(20) generates steam by receiving cleaning water from the cleaning water supply portion. A mixing portion(40) mixes steam in evaporation portion and a carrier gas in a carrier gas supply portion(30). A cooling portion(50) cools and crystallizes the steam which is mixed with the carrier gas in the mixing portion. A agglomeration prevention part(60) causes the steam crystallized in the cooling part to be convected.
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