| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate storage container having high reliability which prevents deformation of a container body to keep sealability, for example, by fixing a transportation member to the container body by using a novel attachment structure. <P>SOLUTION: The substrate storage container comprises: a container body having an opening for storing substrates through the opening; a lid body for closing the opening of the container body; an attachment frame member attached to face a plurality of neighboring faces among a top face, a right side face, a left face, seen from the opening, and a bottom face of the container body; and a transportation member attached to the attachment frame member. Accordingly, the transportation member is indirectly attached to the container body with the attachment frame member interposed therebetween. The attachment frame member is composed of a material having rigidity higher than that of the container body. <P>COPYRIGHT: (C)2012,JPO&INPIT |
