| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a film deposition apparatus which reduces the use amount of selenium and restrains attachment of selenium in a film deposition chamber when a photoelectric conversion layer contains selenium, and to provide a solar cell having the photoelectric conversion layer deposited by the film deposition apparatus. <P>SOLUTION: The film deposition apparatus has: a transfer means for transferring a base material into a film deposition chamber 11; a vacuum exhaust means 40 for adjusting the degree of vacuum in the film deposition chamber to a predetermined value; a vacuum film deposition means for forming a photoelectric conversion layer on the transferred base material; and film deposition rooms 14, 16, 18 provided in the film deposition chamber. Each of the film deposition rooms comprises: a heating wall 36 whose temperature is controlled to be 180°C or higher; and a cooling wall 38 whose temperature is controlled to be 80°C or lower. Then, the vacuum film deposition means is provided in each of the film deposition rooms. The base material is transferred into each of the film deposition rooms, and the photoelectric conversion layer is formed on the base material by the vacuum film deposition means. <P>COPYRIGHT: (C)2012,JPO&INPIT |
