| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar cell in which a microcrystalline silicon layer having a high abundance ratio of microcrystalline silicon to amorphous silicon can be formed in a short time, and the manufacturing time can be shortened. <P>SOLUTION: The method of manufacturing a solar cell includes: a step for forming an amorphous silicon layer on a glass substrate; a step for forming a microcrystalline silicon layer, having a abundance ratio of microcrystalline silicon to amorphous silicon smaller than a prescribed value, to be laminated on the amorphous silicon layer; and a crystallization step for heating and crystallizing the microcrystalline silicon layer by irradiating it with light in a prescribed wavelength range where the absorption coefficient of microcrystalline silicon is higher than that of amorphous silicon, thereby setting the abundance ratio of microcrystalline silicon to amorphous silicon to the prescribed value. <P>COPYRIGHT: (C)2012,JPO&INPIT |
