| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for drying a surface structure, which can dry a plurality of surface structures at a time by quickly coagulating a first liquid that has been deposited on the surface structures. <P>SOLUTION: The method for drying the surface structure that has the first liquid deposited thereon includes the steps of: placing a surface structure part of the surface structure in a second liquid which is a liquid at a temperature lower than a coagulation point of the first liquid, at the temperature; coagulating the first liquid in the second liquid; removing the second liquid from the surface structure part in a state that the first liquid is coagulated; and sublimating the first coagulated liquid. <P>COPYRIGHT: (C)2012,JPO&INPIT |
