发明名称 RADIATION DETECTOR, PITCH ADAPTER, AND METHOD FOR PRODUCING A PITCH ADAPTER
摘要 <p>The invention relates to a radiation detector, a pitch adapter, and a method for producing a pitch adapter, wherein the pitch adapter is for coupling between radiation sensors and readout circuitry of the radiation detector. In prior art solutions, AC coupling and bias resistors of the radiation sensors is provided in the sensor substrate, whereby the production of the sensor wafer is complicated. According to the present invention, AC coupling (22) is provided in the pitch adapter (25), whereby it is also possible to provide bias resistors (23) in the pitch adapter. The pitch adapter is preferably produced on a glass substrate using deposition processes which do not require the use of high temperatures. The process phases for providing mask layers on the sensor wafer can thus be minimised.</p>
申请公布号 WO2012007634(A1) 申请公布日期 2012.01.19
申请号 WO2010FI50600 申请日期 2010.07.16
申请人 HELSINGIN YLIOPISTO;HAERKOENEN, JAAKKO;TUOMINEN, EIJA;TUOVINEN, ESA;LUUKKA, PANJA-RIINA 发明人 HAERKOENEN, JAAKKO;TUOMINEN, EIJA;TUOVINEN, ESA;LUUKKA, PANJA-RIINA
分类号 G01T1/17;H01L23/525;H01L23/66;H01L31/0224;H01L31/115 主分类号 G01T1/17
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