| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wavelength multiplexer/demultiplexer comprising a Mach-Zehnder interferometer and an arrayed waveguide diffraction grating, the wavelength multiplexer/demultiplexer having a simple configuration and being capable of reducing the degradation in the temperature compensation characteristics of a temperature compensation material provided in the Mach-Zehnder interferometer or the peeling-off of the temperature compensation material, and a manufacturing method of the same. <P>SOLUTION: A wavelength multiplexer/demultiplexer 1 according to an embodiment of the present invention comprises an AWG 5 including two separated slab waveguides 51a, 51b and an MZI 6 including two arm waveguides 63a, 63b. Temperature compensation grooves 64a, 64b are formed in the two arm waveguides 63a, 63b. In a space 9 between the temperature compensation grooves 64a, 64b and two separated slab waveguides 51a, 51b, a compensation material 10, with the refractive index matching that of the waveguide core of the AWG 5 or MZI 6, the compensation material having a temperature dependence coefficient with a sign different from that of the temperature dependence coefficient of the waveguide core and having plasticity or fluidity, is filled. <P>COPYRIGHT: (C)2012,JPO&INPIT |
