| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a glass substrate product with reduced surface defect due to foreign matter, and to provide a double-side polishing apparatus for polishing a glass substrate into the glass substrate product with reduced surface defect due to foreign matter, a method of polishing the glass substrate, and a method of manufacturing the glass substrate using the polishing method. <P>SOLUTION: For use in a process of polishing the glass substrate for polishing a principal plane of the glass substrate having a plate form including upper and lower principal planes and side faces, the double-side polishing apparatus having a mist generating nozzle for spraying a misty liquid onto the glass substrate, the method of polishing the glass substrate using the double-side polishing apparatus, and the method of manufacturing the glass substrate including the polishing process using the method of polishing the glass substrate are provided. The invention can provide the glass substrate product with remarkably reduced surface defect due to foreign matter. <P>COPYRIGHT: (C)2012,JPO&INPIT |
