| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of simply manufacturing a transparent conductive substrate in which a light trapping efficiency in a power generation layer can be enhanced for both long wavelength light and short wavelength light without reducing light transmissivity, thereby increasing a power generation efficiency of a thin film solar battery. <P>SOLUTION: A method of manufacturing a transparent conductive substrate comprises at least a step A of applying sol-gel liquid on a transparent substrate, a step B of pressing a mold having a reversed pattern of a desired irregular pattern against the sol-gel liquid to transfer the irregular pattern onto the sol-gel liquid, a step C of solidifying the sol-gel liquid so that a silicon oxide film having the irregular pattern formed on the surface thereof is formed on the transparent substrate, and a step D of forming a transparent conductive film on the silicon oxide film. The irregular pattern comprises a first irregular pattern having a predetermined period, and a second irregular pattern which is disposed on uneven portions constituting the first irregular pattern and has a shorter period than the first irregular pattern. <P>COPYRIGHT: (C)2012,JPO&INPIT |
