发明名称 |
VERTICAL NON-VOLATILE MEMORY DEVICE |
摘要 |
A vertical non-volatile memory device includes a semiconductor pattern disposed on a substrate; and a plurality of transistors of first through n-th layers that are stacked on a side of the semiconductor pattern at predetermined distances from each other, wherein the transistors are spaced apart and insulated from one another at the predetermined distances via air gap, where n is a natural number equal to or greater than 2.
|
申请公布号 |
US2012012920(A1) |
申请公布日期 |
2012.01.19 |
申请号 |
US201113181622 |
申请日期 |
2011.07.13 |
申请人 |
SHIN SEUNG-MOK;JANG KYUNG-TAE;LEE CHANG-WON |
发明人 |
SHIN SEUNG-MOK;JANG KYUNG-TAE;LEE CHANG-WON |
分类号 |
H01L29/792 |
主分类号 |
H01L29/792 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|