发明名称 VERTICAL NON-VOLATILE MEMORY DEVICE
摘要 A vertical non-volatile memory device includes a semiconductor pattern disposed on a substrate; and a plurality of transistors of first through n-th layers that are stacked on a side of the semiconductor pattern at predetermined distances from each other, wherein the transistors are spaced apart and insulated from one another at the predetermined distances via air gap, where n is a natural number equal to or greater than 2.
申请公布号 US2012012920(A1) 申请公布日期 2012.01.19
申请号 US201113181622 申请日期 2011.07.13
申请人 SHIN SEUNG-MOK;JANG KYUNG-TAE;LEE CHANG-WON 发明人 SHIN SEUNG-MOK;JANG KYUNG-TAE;LEE CHANG-WON
分类号 H01L29/792 主分类号 H01L29/792
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