发明名称 METHOD OF MANUFACTURING NON-VOLATILE MEMORY DEVICE
摘要 A non-volatile memory device includes field insulating layer patterns on a substrate to define an active region of the substrate, upper portions of the field insulating layer patterns protruding above an upper surface of the substrate, a tunnel insulating layer on the active region, a charge trapping layer on the tunnel insulating layer, a blocking layer on the charge trapping layer, first insulating layers on upper surfaces of the field insulating layer patterns, and a word line structure on the blocking layer and first insulating layers.
申请公布号 US2012015512(A1) 申请公布日期 2012.01.19
申请号 US201113238084 申请日期 2011.09.21
申请人 SUNG SUK-KANG;LEE CHOONG-HO;CHOI DONG-UK;KANG HEE-SOO;SAMSUNG ELECTRONICS CO., LTD. 发明人 SUNG SUK-KANG;LEE CHOONG-HO;CHOI DONG-UK;KANG HEE-SOO
分类号 H01L21/28 主分类号 H01L21/28
代理机构 代理人
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