发明名称 BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING THE SAME
摘要 A carrier assembly is provided comprising a backside mounted electrode carrier and electrode mounting hardware. The backside mounted electrode carrier comprises an electrode accommodating aperture, which in turn comprises a sidewall structure that is configured to limit lateral movement of an electrode positioned in the aperture. The electrode accommodating aperture further comprises one or more sidewall projections that support the weight of an electrode positioned in the aperture. The electrode mounting hardware is configured to engage an electrode positioned in the electrode accommodating aperture from the backside of the carrier and urge the electrode against the sidewall projections so as to limit axial movement of the electrode in the electrode accommodating aperture. Additional embodiments of broader and narrower scope are contemplated.
申请公布号 US2012013242(A9) 申请公布日期 2012.01.19
申请号 US20080164285 申请日期 2008.06.30
申请人 AUGUSTINO JASON;AVOYAN ARMEN;FANG YAN;OUTKA DUANE;SHIH HONG;WHITTEN STEPHEN;LAM RESEARCH CORPORATION 发明人 AUGUSTINO JASON;AVOYAN ARMEN;FANG YAN;OUTKA DUANE;SHIH HONG;WHITTEN STEPHEN
分类号 H01J19/42 主分类号 H01J19/42
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