| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an irradiation device that achieves irradiation with irradiation light of high parallelism although making the device compact and also suppressing the device cost. <P>SOLUTION: An artificial solar light irradiation device 1 includes a lamp 10 which emits light, an elliptic reflector 11 as a light-gathering reflector for gathering the light of the lamp, a fly-eye lens 13 on which luminous flux from the elliptic reflector 11 is made incident, and a collimation optical system 14 which parallelizes luminous flux passed through the fly-eye lens 13 to irradiate a sample mount surface 9 as an irradiation surface with the parallel light. The irradiation device further includes a first mirror 20 which reflects the luminous flux of the elliptic reflector 11 at an acute angle, and a second mirror 22 which reflects the luminous flux reflected by the first mirror 20 at an acute angle, wherein the collimation optical system 14 is provided with a spherical mirror 16, the fly-eye lens 13 is disposed on an optical path L1 between the first mirror 20 and the second mirror 22, and the spherical lens 16 is so disposed as to reflect the luminous flux reflected by the second mirror 22 toward the sample mount surface 9 in parallel with an optical axis K1 of the elliptic reflector 11. <P>COPYRIGHT: (C)2012,JPO&INPIT |
