| 发明名称 |
METHOD FOR FORMING MICROSTRUCTURE AND MICROPATTERN |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To simply patternize various substances in a method for forming a microstructure and a micropattern. <P>SOLUTION: The microstructure has a minute uneven structure consisting of a plurality of projecting parts and a plurality of recessed parts, and a deposition part is formed on a surface of each of the projecting parts. <P>COPYRIGHT: (C)2012,JPO&INPIT |
| 申请公布号 |
JP2012011478(A) |
申请公布日期 |
2012.01.19 |
| 申请号 |
JP20100148515 |
申请日期 |
2010.06.30 |
| 申请人 |
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE& TECHNOLOGY |
发明人 |
OSONO TAKUYA;MONOBE HIROTATSU |
| 分类号 |
B82B3/00;B32B3/30;B82B1/00;H01L21/027 |
主分类号 |
B82B3/00 |
| 代理机构 |
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| 主权项 |
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