REFLECTING MIRROR, ILLUMINATION DEVICE, AND METHOD FOR MANUFACTURING REFLECTING MIRROR

摘要

PROBLEM TO BE SOLVED: To provide a reflecting mirror having a reflective film which has high manufacturing efficiency and excels in moisture resistance and alkali resistance, and to provide an illumination device.

SOLUTION: A reflecting mirror includes an alloy film 23 of aluminum and gadolinium used as a reflective film, and an oxide layer 24 obtained by oxidizing the alloy film is provided on the surface of the alloy film. The reflecting mirror excels in alkali resistance and moisture resistance without separately providing a protection film. It is preferable that the content of gadolinium in the alloy film is 4 at% or less and 1 at% or more. The oxide layer 24 can be formed by an oxygen plasma treatment step which exposes the surface of the alloy film 23 to oxygen plasma.

COPYRIGHT: (C)2012,JPO&INPIT