| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a QCM device allowing a measurement gas to flow through a measurement chamber without changing molecule composition of the gas. <P>SOLUTION: The QCM device comprises: a measurement chamber forming a closed space having an intake port at one end through which a measurement objective gas is supplied and a discharge port at the other end to discharge the measurement objective gas; pressure difference generating means that generates a pressure difference between the intake port and the discharge port to cause the measurement objective gas to move from the intake port toward the discharge port; and plural vibrators disposed in the measurement chamber in a flow direction of the measurement objective gas. The measurement chamber is constituted of a metal container inner wall applied with fluoropolymer. The plural vibrators enclosed by the inner wall applied with fluoropolymer are formed with a sensitive membrane each adsorbing a specific gas molecule. <P>COPYRIGHT: (C)2012,JPO&INPIT |
