| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ion scattering spectroscopy measuring method which can appropriately determine irradiation quantity of probe particles. <P>SOLUTION: The ion scattering spectroscopy measuring method comprises: a step for starting radiation of probe particles to a sample; a step for integrating the number of the probe particles scattered at the sample and detected to a first irradiation quantity and obtaining a first ion scattering spectrum; a step for integrating the number of the detected probe particles to a second irradiation quantity which is more than the first irradiation quantity and obtaining a second ion scattering spectrum; a step for calculating a first scattering ratio which is the number of the detected probe particles per unit irradiation quantity for a first energy range corresponding to a first element in the sample, based on the first ion scattering spectrum; a step for calculating a second scattering ratio for the first energy range based on the second ion scattering spectrum; and a step for determining whether the difference of the second scattering ratio from the first scattering ratio is small or not relative to the standard. <P>COPYRIGHT: (C)2012,JPO&INPIT |
