发明名称 |
Method for processing wafer for e.g. integrated circuit, involves removing division tape attached to annular amplification section as well as annular frame to remove annular reinforcing section |
摘要 |
<p>The method involves receiving a wafer into an aperture of an annular frame, and adhering a division tape at a front surface of the wafer. An annular reinforcing section with which the wafer is held at the frame is disconnected to separate a component region and the annular reinforcing section from each other. The division tape attached to the annular amplification section as well as the frame is removed to remove the annular reinforcing section.</p> |
申请公布号 |
DE102011078726(A1) |
申请公布日期 |
2012.01.19 |
申请号 |
DE20111078726 |
申请日期 |
2011.07.06 |
申请人 |
DISCO CORPORATION |
发明人 |
PRIEWASSER, KARL;TABUCHI, TOMOTAKA |
分类号 |
H01L21/673;H01L21/301;H01L21/304 |
主分类号 |
H01L21/673 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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