| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the following problem: an image distribution control unit using existing InfiniBand(R) control performs buffer memory control and distribution processing by OS on a single CPU, so that conflict occurs, distribution latency fluctuates, and it is inapplicable to semiconductor appearance inspection equipment. <P>SOLUTION: The semiconductor inspection equipment includes an inspection part, a detection part, and a processing part for inspecting a surface of an inspection object by processing an image based on reflecting light detected by the detection part. The processing part includes an image distribution control unit for distributing the images and an image processing part for processing the images distributed by the image distribution control unit. The image distribution control unit has: an image buffer counter for counting an input image amount of the image; a distribution control table for storing information about the image; and a distribution timing control circuit for determining distribution start timing of the image on the basis of the input image amount and information about the image from the distribution control table. <P>COPYRIGHT: (C)2012,JPO&INPIT |
