发明名称 THROUGH-WIRING BOARD AND MANUFACTURING METHOD THEREOF
摘要 <P>PROBLEM TO BE SOLVED: To provide a through-wiring board having a through-via capable of preventing the formation of void. <P>SOLUTION: The present invention provides a through-wiring board with a through-via which comprises: a substrate provided with a through-hole; a conductor which is arranged in the through-hole and electrically connects an upper face and a lower face of the substrate; and resin filled in a gap between the conductor and the through-hole. The invention also provides a manufacturing method of such a through-wiring board. The substrate may be a glass substrate. The resin may be a polyimide. The resin may also be a polymer. Further, the resin may be photo-curable resin which reacts to light and changes into a solid. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012015209(A) 申请公布日期 2012.01.19
申请号 JP20100148197 申请日期 2010.06.29
申请人 ADVANTEST CORP 发明人 CHIBA YOSHIYUKI
分类号 H05K1/11;H01L21/3205;H01L23/52;H05K3/40 主分类号 H05K1/11
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