| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electron beam device with a detecting device capable of easily making a selection especially based on the difference between backscattered electrons and secondary electrons. <P>SOLUTION: An electron beam device (7) comprises an electron source (8), an objective lens (12), a first and second detectors (19, 21), and a reverse field grid (36) allocated to the second detector (21) and disposed on the side of the second detector (21) facing an object. A part of electrons which is emitted by the object (18) and passed through the hole of the first detector (19), is deflected by the reverse field grid (36), and a voltage is applied to the reverse field grid (36) to prevent the second detector (21) from detecting the deflected electrons. <P>COPYRIGHT: (C)2012,JPO&INPIT |
