发明名称 |
COMBINED PUMPING SYSTEM COMPRISING A GETTER PUMP AND AN ION PUMP |
摘要 |
A combined pumping system comprising a getter pump and an ion pump is described. The getter pump and the ion pump are mounted in series on a same flange and are respectively arranged on opposite sides thereof so that both getter and ion pumps conductance are maximized towards gas flux sources in a vacuum chamber in order to improve the vacuum level of the system. |
申请公布号 |
US2012014814(A1) |
申请公布日期 |
2012.01.19 |
申请号 |
US201013202890 |
申请日期 |
2010.03.09 |
申请人 |
BONUCCI ANTONIO;CONTE ANDREA;MANINI PAOLO;SAES GETTERS S.P.A. |
发明人 |
BONUCCI ANTONIO;CONTE ANDREA;MANINI PAOLO |
分类号 |
H01J41/12 |
主分类号 |
H01J41/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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