发明名称 Multipoint Voltage And Current Probe System
摘要 A metrology system monitors radio frequency (RF) power at a plurality of locations in a circuit. The system includes a plurality of RF sensors that generate respective analog signals based on electrical properties of the RF power, a multiplexing module that generates an output signal based on the analog signals, and an analysis module that generates messages based on the output signal. The messages contain information regarding the electrical properties that are sensed by the plurality of RF sensors.
申请公布号 US2012013352(A1) 申请公布日期 2012.01.19
申请号 US201113241633 申请日期 2011.09.23
申请人 CHOUEIRY RAY;HECKLEMAN TODD;COUMOU DAVID J.;MKS INSTRUMENTS, INC. 发明人 CHOUEIRY RAY;HECKLEMAN TODD;COUMOU DAVID J.
分类号 G01R27/04 主分类号 G01R27/04
代理机构 代理人
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