发明名称 Ion source
摘要 A cathode sub-assembly is comprised of a retainer, a cathode and a collar, each of which has smooth unthreaded surfaces that slidably engage each other. A shield serves to hold the sub-assembly in a support plate. The cathode projects from the sub-assembly into an arc chamber with a tortuous path created therebetween for passage of a plasma flow.
申请公布号 US2012013249(A1) 申请公布日期 2012.01.19
申请号 US20100804277 申请日期 2010.07.19
申请人 JEREZ MANUEL A. 发明人 JEREZ MANUEL A.
分类号 H01J27/08;H01J1/88;H01J61/04 主分类号 H01J27/08
代理机构 代理人
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