FILM-FORMING APPARATUS AND METHOD FOR CLEANING FILM-FORMING APPARATUS

摘要

Provided is a film-forming apparatus which is safe for a cleaning worker and which makes it possible for attached matter inside a vacuum chamber to be cleaned within a shorter period of time and at a lower cost than with a conventional apparatus, and also provided is a method for cleaning the film-forming apparatus. A hollow tank (19) formed of a material that does not dissolve in a cleaning solution which can dissolve film-forming particles is connected to a vacuum chamber (11) of a film-forming apparatus (10a), and a drainage outlet (15) is disposed in the bottom surface of the vacuum chamber (11). After a substrate (21) is carried out of the vacuum chamber (11), the cleaning solution is introduced from the tank (19) into the vacuum chamber (11), the film-forming particles attached inside the vacuum chamber (11) come into contact with the cleaning solution, a film-forming material is dissolved in the cleaning solution, and the cleaning solution is discharged from the drainage outlet (15) to outside of the vacuum chamber (11).