发明名称 END HAT FOR MAGNETRON, PROCESS FOR PRODUCING SAME, AND MAGNETRON
摘要 <p>Disclosed is an end hat for magnetrons which is constituted of sintered Mo, characterized in that the surface area ranging from the surface of the sintered Mo to a depth of 100 µm therefrom has a carbon content of 30 ppm or less and the central area ranging from the thickness-direction center of the sintered Mo to distances of ±100 µm therefrom has a carbon content of 50-300 ppm. By reducing the carbon content in the surface area, long-term reliability can be improved. The end hat for magnetrons which has high long-term reliability can be produced in a high yield.</p>
申请公布号 WO2012008580(A1) 申请公布日期 2012.01.19
申请号 WO2011JP66243 申请日期 2011.07.15
申请人 KABUSHIKI KAISHA TOSHIBA;TOSHIBA MATERIALS CO., LTD.;MORIOKA, TSUTOMU;AOYAMA, HITOSHI 发明人 MORIOKA, TSUTOMU;AOYAMA, HITOSHI
分类号 H01J23/04 主分类号 H01J23/04
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