发明名称 |
END HAT FOR MAGNETRON, PROCESS FOR PRODUCING SAME, AND MAGNETRON |
摘要 |
<p>Disclosed is an end hat for magnetrons which is constituted of sintered Mo, characterized in that the surface area ranging from the surface of the sintered Mo to a depth of 100 µm therefrom has a carbon content of 30 ppm or less and the central area ranging from the thickness-direction center of the sintered Mo to distances of ±100 µm therefrom has a carbon content of 50-300 ppm. By reducing the carbon content in the surface area, long-term reliability can be improved. The end hat for magnetrons which has high long-term reliability can be produced in a high yield.</p> |
申请公布号 |
WO2012008580(A1) |
申请公布日期 |
2012.01.19 |
申请号 |
WO2011JP66243 |
申请日期 |
2011.07.15 |
申请人 |
KABUSHIKI KAISHA TOSHIBA;TOSHIBA MATERIALS CO., LTD.;MORIOKA, TSUTOMU;AOYAMA, HITOSHI |
发明人 |
MORIOKA, TSUTOMU;AOYAMA, HITOSHI |
分类号 |
H01J23/04 |
主分类号 |
H01J23/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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