发明名称 |
FLUORESCENCE-DETECTING DISK INSPECTION SYSTEM |
摘要 |
<p>An optical inspection system includes a fluorescence channel that detects fluorescent behavior (or lack thereof) of artifacts present on a surface under inspection and at least one other optical channel for determining a characteristic of the surface under inspection in an illuminated spot. The other optical channel may be a height measuring channel, such as an interferometric channel or a deflectometric channel, the other optical channel may be a scatterometric channel, or both height measurement and scatterometry may be employed in combination as a three channel system. The presence of absence of fluorescent behavior may be used to correct assumptions about or determine a type of artifact detected by scatterometry, and may be used to correct the polarity of a height measurement made by a height-measuring channel.</p> |
申请公布号 |
WO2012009240(A1) |
申请公布日期 |
2012.01.19 |
申请号 |
WO2011US43482 |
申请日期 |
2011.07.09 |
申请人 |
XYRATEX TECHNOLOGY LIMITED |
发明人 |
BRUNFELD, ANDREI;TOKER, GREGORY;CLARK, BRYAN |
分类号 |
G01N21/47 |
主分类号 |
G01N21/47 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|