RESIDUE REMOVING APPARATUS AND RESIDUE REMOVING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a residue removing apparatus and a residue removing method capable of adequately removing the residue with a brush consisting of a soft material in a method for removing the residue by brush rotation.

SOLUTION: The residue removing apparatus for removing a residue of an anisotropic conductive film remaining on a substrate includes a brush which abuts on the residue and rotates by receiving predetermined driving force. A portion abutting on the residue comprises: a plant resin; and pressuring means for applying a pressure for removing the residue to an abutting portion between the brush and the residue.

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