| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable a smooth operation of rotating a rotatable and openable/closable vacuum chamber with airtightness kept. <P>SOLUTION: A magnification observation apparatus has a cover portion 27 for blocking an opening end of a middle portion 24 constituting a pressure-reducible sample chamber 21 so that the opening end can be freely opened and closed, and rotating means for rotating the middle portion 24. The cover portion 27 has a blocking plate 28 for blocking the opening end of the middle portion 24, cover opening/closing means for changing the blocking plate 28 between open position and close positions, a cover rotating shaft 142 for freely rotatably supporting the blocking plate 28 on a cover opening/closing arm 29 with a substantially disc-shaped center of the blocking plate 28 set as a rotational axis, and a holding mechanism 140 for holding an attitude of the blocking plate 28 so that the rotational axis of the blocking plate 28 substantially matches the rotational axis of the middle portion 24 at the closing position when the blocking plate 28 is at the opening position, and also holding the cover rotating shaft 142 so that the holding state is released when the blocking plate 28 is changed from the opening position to the closing position. <P>COPYRIGHT: (C)2012,JPO&INPIT |
