发明名称 METAL GATE SEMICONDUCTOR DEVICE
摘要 A semiconductor device includes a semiconductor substrate, a source and a drain region formed on the semiconductor substrate, and a gate structure disposed on the substrate between the source and drain regions. The gate structure includes an interfacial layer formed over the substrate, a high-k dielectric formed over the interfacial layer, and a metal gate formed over the high-k dielectric that includes a first metal layer and a second metal layer, where the first metal layer is formed on a portion of the sidewalls of the gate structure and where the second metal layer is formed on another portion of the sidewalls of the gate structure.
申请公布号 US2012012948(A1) 申请公布日期 2012.01.19
申请号 US201113245494 申请日期 2011.09.26
申请人 YEH CHING-HAN;HSU CHEN-PIN;WU MING-YUAN;THEI KONG-BENG;CHUANG HARRY;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. ("TSMC") 发明人 YEH CHING-HAN;HSU CHEN-PIN;WU MING-YUAN;THEI KONG-BENG;CHUANG HARRY
分类号 H01L29/78 主分类号 H01L29/78
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