SYSTEM AND METHOD FOR CAPTURING ILLUMINATION REFLECTED IN MULTIPLE DIRECTIONS

摘要

PURPOSE: A system and a method for capturing illumination reflected into multiple directions are provided to automatically detect defect and failure by performing the digital analysis for a reference image and an operation image. CONSTITUTION: A system includes a first image capturing device(32) and a second image capturing device(34). The first image capturing device and the second image capturing device receive darkfield illumination which is provided with a darkfield illumination device(28) having a low angle and the darkfield illumination device(30) having a high angle. The first image capturing device and the second image capturing device capture a monochromatic image and a color image. An optic inspection head(14) includes a first tube lens and a second tube lens.