| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and apparatus for positioning an electron beam device, and provide a method for positioning an electron beam with less periodical fluctuation and an electron beam apparatus having the function. <P>SOLUTION: An electron beam device comprises: an electron source 1 for generating an electron beam; an optical system for accelerating, decelerating, converging, and deflecting the electron beam; a control system for scanning the electron beam or for controlling blanking; a stage 6 for holding a material 7 which is irradiated with the electron beam; a stage length measurement system 16a for measuring the position of the stage 6; an electron detection section 18 for detecting the electron beam emitted from the material 7; and a signal processing system 19 for processing a detection signal obtained from the electron detection section 18. A periodic signal whose amplitude and phase can be adjusted is added to a compensation signal from the stage length measurement system 16a. <P>COPYRIGHT: (C)2012,JPO&INPIT |
