| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mechanism which supports a large cassette for substrate on a mounting table and reduces vibration easily in a mounting table of a cassette for substrate such as a transfer device or a load port. <P>SOLUTION: A mounting table 2 on which a cassette for substrate is mounted has a plurality of crosspieces 18 on the bottom surface thereof. A plurality of receiving bases 20 of the crosspieces 18 having a viscoelastic body are attached to the body of the mounting table 2, and the bottom surface of a cassette is supported by the receiving bases 20. <P>COPYRIGHT: (C)2012,JPO&INPIT |
