LIQUID APPLICATION DEVICE AND LIQUID APPLICATION METHOD, AND NANOINPRINT SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a liquid application device and a liquid application method, and a nanoinprint system which optimize droplet ejection of a functional liquid onto a substrate by an inkjet system and form a preferable fine pattern.

SOLUTION: The liquid application device includes: a liquid discharge head (110) that has a structure in which a plurality of nozzles (120) for performing droplet ejection of a functional liquid onto the substrate (102) are aligned in a row in a predetermined direction, and that includes a plurality of liquid chambers (122) communicating with a plurality of the nozzles respectively and piezoelectric elements which are provided in association with the plurality of the liquid chambers and serve to pressurize the liquid in the liquid chambers. The piezoelectric element is operated to cause the liquid to land discretely on the substrate by the relative movement between the substrate and the liquid discharge head and the operation of the piezoelectric elements is controlled according to each of groups formed by grouping the nozzles according to the structure of the liquid discharge head.

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