| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical component which is designed such that the requirement of purification of high quality at the final cleaning step is met by making feedback of the inspection information for quantitatively evaluating the number of added colloidal silica of polishing liquid and making switch to an optimal washing agent. <P>SOLUTION: A method according to the present invention includes a finely polishing step in which an optical component 50 is finely polished by using polishing liquid including colloidal silica 52 which are abrasive grains based on silica and obtained by bonding of fluorescence coloring matters 53 on their surfaces, a final cleaning step in which the foreign body adhered on the optical component 50 finely polished is cleared and removed, and an inspection step for quantitatively evaluating the number of added colloidal silica 52 adhered on the optical component 50 which has been subjected to the final cleaning. <P>COPYRIGHT: (C)2012,JPO&INPIT |
